X-ray transmission type two-dimensional measuring device 'MVX-818'
This single device can perform layer misalignment analysis and exposure film measurement.
The MVX-818 is an X-ray transmission type two-dimensional measuring device that performs pattern visualization confirmation and pattern coordinate measurement of multilayer substrates using an X-ray camera. By measuring at each stage from exposure to completion, it is possible to analyze the expansion, contraction, and deformation of the substrate. Since it is also equipped with a CCD camera, it can measure exposure films and other items that cannot be measured with X-rays, allowing for analysis of each process with a single device. 【Features】 ■ Feedback of measurement data before and after the manufacturing process of multilayer substrates ■ Zoom function of the X-ray camera ■ High-precision measurement from large patterns to small patterns ■ Stable measurements *For more details, please refer to the catalog or feel free to contact us.
- 企業：ムラキ
- 価格：Other
